| Wet Chemical Etching Characteristics of AlN Thin Films | I. Cimalla, V. Cimalla, V. Lebedev, K. Tonisch, F. Will, O. Ambacher, E.S. Zaus, M. Stutzmann, M. E | | | |
| Herstellung und Charakterisierung von gesputterten Aluminiumnitrid- Dünnschichten für MEMS Anwendung | A. Ababneh, H. Seidel, U. Schmid | | | |
| The Influence of Varying Sputter Deposition Conditions on the Wet Chemical Etch Rate of AlN Thin Fil | A. Ababneh, H. Kreher, H. Seidel, U. Schmid | | | |
| Investigations on the Passivation of Thin Film Flow Sensors on Flexible Substrates | U. Schmid, A. Ababneh, H. Seidel, R. Wagner, K. Bauer | | | |
| Piezoelectric Characterization of AlN Thin Films on Silicon Substrates | J. Hernando, J.L. Sánchez-Rojas, A. Ababneh, U. Schmid, S. González-Castilla, J. Olivares, E. Iborra | | | |
| Advanced Determination of Piezoelectric Properties of AlN Thin Films on Silicon Substrates | J.L. Sánchez-Rojas, J. Hernando, A. Ababneh, U. Schmid, J. Olivares, M. Clement, E. Iborra | | | |
| Dry etching of sputter deposited AlN-thin films for the realization of piezoelectric MEMS | Ü. Sökmen, E. Peiner, A. Waag, A. Ababneh, H. Seidel, U. Schmid | | | |
| Characterization and simulation of high quality AlN-actuated resonant suspended beams | J. Hernando, J. L. Sanchez-Rojas, A. Ababneh, H. Seidel, Ü. Sökmen, E. Peiner, U. Schmid | | | |
| Analysis of the Quality Factor of Piezoelectric-Actuated Micro-resonators | T. Manzaneque, J. Hernando, L. Rodríguez-Aragón, A. Ababneh, H.Seidel, U. Schmid, J. L. Sánchez-Roja | | | |
| Sputtered polycrystalline AlN as a platform for biofunctionalized devices | M. J. Oliver, J. Hernando, J. Olivares, M. Clement, A. Ababneh, U. Schmid, J. L. Sánchez-Rojas | | | |
| Comparison Between AlN Thin Films with Different Crystal Orientation for MEMS Applications | A. Ababneh, G. Marchand, H. Seidel, J. Hernando, J.L. Sánchez-Rojas, Ü. Sökmen, E. Peiner, U. Schmid | | | |
| AlN on Silicon Cantilever Resonators for Mass Sensing Fabricated Using ICP-DRIE | Ü. Sökmen, E. Peiner, A. Waag, A. Ababneh, H. Seidel, U. Schmid | | | |
| Piezoelectric modal sensors/actuators based on microplates applying surface electrode pattering | J.L. Sanchez-Rojas, J. Hernando, A. Donoso, J.C. Bellido, L.M. Gutiérrez, A. Ababneh, H. Seidel, U. | | | |
| Ermittlung der piezoelektrischen Koeffizienten von AlN-Dünnfilmen mit unterschiedlicher Kristallorie | A. Ababneh, U. Schmid, J. Hernando, J.L. Sánchez-Rojas, H. Seidel | | | |
| Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop | T. Manzaneque, J. Hernando, A. Ababneh, H. Seidel, Ü. Sökmen, E. Peiner, U. Schmid, J.L. Sánchez-Roj | | | |
| Piezoelectric Micro-Scale Tuning Fork Resonators For Sensing Applications; Transducers 2011 , pp. 14 | M. Gil, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, J. L. Sánchez-Rojas | | | |
| Characterization of the first in-plane mode of AlN-actuated microcantilevers
| V. Ruiz, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. K. Gimzewski, J. L. Sánchez Rojas | | | |
| Piezoelectric AlN-actuated micro-tuning forks for sensing applications | M. Gil, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, J. L. Sánchez-Rojas | | | |
| Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions | M. J. Oliver, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. Olivares, E. Iborra, P. Pobed | | | |
| The impact of titanium film properties on the c-axis orientation of sputter-deposited AlN thin films | A. Ababneh, H. Seidel , T. Manzaneque, J. Hernando, J. L. Sánchez-Rojas, A. Bittner, U. Schmid | | | |
| Comparison of quartz tuning forks and AlN-based extensional
microresonators for viscosity measureme | J. Serrano, T. Manzaneque, J. Hernando, J. Vázquez, A. Ababneh, H. Seidel, M. Lapuerta, J. L. Sánche | | | |
| Investigations on the high temperature compatibility of various adhesion layers for platinum | A. Ababneh, A. N . Al-Omari, M. Marschibois, D. Feili, H. Seidel | | | |
| Contour and flexure-actuated in-plane modes of AlN-based piezoelectric vibrating MEMS | V. Ruiz, T. Manzaneque, J. Hernando, A. Ababneh, M. Kucera, A. N. Al-Omari, A. Bittner, U. Schmid, H | | | |
| Pressure dependence of the quality factor of piezoelectrically driven AlN/Si-microcantilevers | A. Ababneh, A. N. Al-Omari, H. Qiu, T. Manzaneque, J. Hernando, J. L. Sánchez Rojas, A. Bittner, U. | | | |
| Optical and electrical characterization of in-plane modes of
AlN-based piezoelectric vibrating MEMS | V. Ruiz, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, E. Vikhagen, J. L. Sánchez- Rojas | | | |
| Impact of Annealing Temperature on Piezoelectric and Morphological Properties of Aluminum Nitride Th | Abdallah ababneh | | | |
| High-speed dielectric-planarized 850nm surface-emitting lasers with metal-plated heat sinks | AN Al-Omari, OM Khreis, AMK Dagamseh, A Ababneh, KL Lear | | | ---- |
| In-liquid characterization of high order out-of-plane modes in piezoelectric square plates | V Ruiz-Díez, J Toledo, T Manzaneque, J Hernando-García, A Ababneh, H Seidel, JL Sánchez-Rojas | | | ---- |