Yarmouk University Academic Profile

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Conference	Date	Title	Authors	Inventor
Advanced Determination of Piezoelectric Properties of AlN Thin Films on Silicon Substrates	J.L. Sánchez-Rojas, J. Hernando, A. Ababneh, U. Schmid, J. Olivares, M. Clement, E. Iborra
AlN on Silicon Cantilever Resonators for Mass Sensing Fabricated Using ICP-DRIE	Ü. Sökmen, E. Peiner, A. Waag, A. Ababneh, H. Seidel, U. Schmid
Analysis of the Quality Factor of Piezoelectric-Actuated Micro-resonators	T. Manzaneque, J. Hernando, L. Rodríguez-Aragón, A. Ababneh, H.Seidel, U. Schmid, J. L. Sánchez-Roja
Characterization and simulation of high quality AlN-actuated resonant suspended beams	J. Hernando, J. L. Sanchez-Rojas, A. Ababneh, H. Seidel, Ü. Sökmen, E. Peiner, U. Schmid
Characterization of the first in-plane mode of AlN-actuated microcantilevers	V. Ruiz, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. K. Gimzewski, J. L. Sánchez Rojas
Comparison Between AlN Thin Films with Different Crystal Orientation for MEMS Applications	A. Ababneh, G. Marchand, H. Seidel, J. Hernando, J.L. Sánchez-Rojas, Ü. Sökmen, E. Peiner, U. Schmid
Comparison of quartz tuning forks and AlN-based extensional microresonators for viscosity measureme	J. Serrano, T. Manzaneque, J. Hernando, J. Vázquez, A. Ababneh, H. Seidel, M. Lapuerta, J. L. Sánche
Contour and flexure-actuated in-plane modes of AlN-based piezoelectric vibrating MEMS	V. Ruiz, T. Manzaneque, J. Hernando, A. Ababneh, M. Kucera, A. N. Al-Omari, A. Bittner, U. Schmid, H
Dry etching of sputter deposited AlN-thin films for the realization of piezoelectric MEMS	Ü. Sökmen, E. Peiner, A. Waag, A. Ababneh, H. Seidel, U. Schmid
Ermittlung der piezoelektrischen Koeffizienten von AlN-Dünnfilmen mit unterschiedlicher Kristallorie	A. Ababneh, U. Schmid, J. Hernando, J.L. Sánchez-Rojas, H. Seidel

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