C-axis orientation and Piezoelectric Coefficients of AlN Thin Films Sputter-Deposited on Titanium Bo | A. Ababneh, M. Alsumady, H. Seidel , T. Manzaneque, J. Hernando, J. L. Sánchez-Rojas, A. Bittner, U. | Applied Surface Science | 259 | Elsevier | 2012/10/15 |
Characterization and simulation of the first extensional mode of rectangular micro-plates in liquid | T. Manzaneque, V. Ruiz, J. Hernando-Garcia, A. Ababneh, H. Seidel, and J. L. Sanchez-Rojas | APPLIED PHYSICS LETTERS | 101 | AIP Publishing | 2012/10/8 |
Selective modal excitation in coupled piezoelectric microcantilevers | M. Gil, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, J. L. Sánchez-Rojas | Microsystem Technologies | Volume 18, Numbers 7-8, pp. 917-924 | Springer | 2012 |
Resonantly excited AlN-based microcantilevers for immunosensing | M. J. Oliver, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. P. Andrés, P. Pobedinskas, K. | Microsystem Technologies | Volume 18, Numbers 7-8, pp. 108 | Springer | 2012 |
Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode | V. Ruiz, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. L. Sánchez-Rojas | Microsystem Technologies | Volume 18, Numbers 7-8, pp. 997-1001 | Springer | 2012 |
Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback lo | T. Manzaneque, J. Hernando-García, A. Ababneh, P. Schwarz, H. Seidel, U. Schmid, J. L. Sánchez-Rojas | Journal of Micromechanics and Microengineering | vol. 21, no. 2, 025007 | IOP science | 2011 |
Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrat | Bittner, A. Ababneh, H. Seidel, U. Schmid | Applied surface science | Volume 257; 1088-1091 | Elsevier | 2010 |
The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thi | A. Ababneh, U. Schmid, J. Hernando, J.L. Sánchez-Rojas, H. Seidel | Materials Science and Engineering B | Volume 172; 253–258 | Elsevier | 2010 |
Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass | U. Sökmen, A. Stranz, A. Waag, A. Ababneh, H. Seidel, U. Schmid, E. Peiner | Journal of Micromechanics and Microengineering | 20 (6), art. no. 064007 | IOP science | 2010. |
Fourier transform mechanical spectroscopy of micro-fabricated electromechanical resonators: A novel, | R. P. Wali, P. R. Wilkinsona, S. P. Eaimkhonga, J. Hernando, J. L. Sanchez-Rojas, A. Ababneh, J. K. | Sensors and Actuators B: Chemical | doi:10.1016/j.snb.2010.03.086 | Elsevier | 2010 |
Modal optimization and filtering in piezoelectric microplate resonators | J. Sanchez-Rojas, J. Hernando, A. Donoso, J. Bellido, T. Manzaneque, A. Ababneh, H. Seidel, U. Schmi | Journal of Micromechanics and Microengineering | 20 (5), art. no. 055027 | IOP science | 2010 |
Characterization and displacement control of low surface stress AlN-based piezoelectric micro resona | J. Hernando, J. L. Sánchez-Rojas, U. Schmid, A. Ababneh, G. Marchand and H. Seidel | Microsystem Technologies | 10.1007/s00542-009-1015-y | Springer | 2010 |
Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid | T. Manzaneque, J. Hernando, L. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid and J. L. Sánchez- | Microsystem Technologies | 10.1007/s00542-009-1003-2 | Springer | 2010 |
Simulation and Laser Vibrometry Characterization of Piezoelectric AlN Thin Films | J. Hernando, J.L. Sánchez-Rojas, E. Iborra, A. Ababneh, U. Schmid | Journal of Applied Physics | Vol. 104 | AIP Publishing | 2008 |
Characterization of Aluminium Nitride and Aluminium Oxide Thin Films Sputter-Deposited On Organic Su | U. Schmid, A. Ababneh, H. Seidel, R. Wagner, K. Bauer | Microsystem Technologies | Vol. 14, No. 4-5, pp. 483-490 | Springer | 2008 |
Etching Behaviour of Sputter-Deposited Aluminium Nitride Thin Films in H3PO4 and KOH Solutions | A. Ababneh, H. Kreher, U. Schmid | Microsystem Technologies | Vol. 14, No. 4-5, pp. 567-573 | Springer | 2008 |
Improved performance of top-emitting oxide-confined polyimide-planarized 980nm VCSELs with copper-pl | A. N. AL-Omari, M. S. Alias, A. Ababneh, K. L. Lear | JOURNAL OF PHYSICS D: APPLIED PHYSICS | 45 | IOP | 2012/11/19 |
Multimodal characterisation of high- Q piezoelectric micro-tuning forks | M. Gil, T. Manzaneque, J. Hernando, A. Ababneh, H. Seidel, J. L. Sánchez-Rojas | IET Circuits, Devices & Systems | 7 | IET Research Journals | 2013/11/1 |
Design and characterization of AlN-based in-plane microplate resonators | V. Ruiz-Diez, T. Manzaneque, J. Hernando-Garcia, A. Ababneh, M. Kucera, U. Schmid, H. Seidel and J. | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 23 | IOP science | 2013/6/24 |
AlN micromechanical radial-contour disc resonator | Gang Wang, Li-Xin Xu, Abdallah Ababneh, Patrick Schwarz, Dara Feili, Helmut Seidel | Journal of Micromechanics and Microengineering | 23 | IOP science | 2013/8/1 |
Electrical characterization of micromachined AlN resonators at various back pressures | Abdallah Ababneh, A. N. Al-Omari, A. M. K. Dagamseh, H. C. Qiu, D. Feili, V. Ruiz-Díez, T. Manzanequ | Microsystem Technologies | 20 | Springer | 2014/4/1 |
Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes | Tomás Manzaneque, V. Ruiz-Díez, J. Hernando-García, A. Ababneh, A. N. Al-Omari, M. Kucera, A. Bittne | Microsystem Technologies | 20 | Springer | 2014/4/1 |
Application of quartz tuning forks and extensional microresonators for viscosity and density measure | J. Toledo, T. Manzaneque, J. Hernando-García, J. Vázquez, A. Ababneh, H. Seidel, M. Lapuerta and J. | Microsystem Technologies | 20 | Springer | 2014/4/1 |
Analysis of intrinsic damping in vibrating piezoelectric microcantilevers | Huacheng Qiu, Abdallah Ababneh, Dara Feili, Xuezhong Wu, Helmut Seidel | Microsystem Technologies | 22 | Springer | 2016/8/1 |
Electrical and morphological characterization of platinum thin-films with various adhesion layers for high temperature applications | Abdallah Ababneh, AN Al-Omari, AMK Dagamseh, M Tantawi, C Pauly, F Mücklich, D Feili, H Seidel | Microsystem Technologies | 23 | Springer | 2017/3/1 |
High-Speed Inverted-Polarity Oxide-Confined Copper-Plated 850-nm Vertical-Cavity Lasers | Ahmad AL-Omari, Abdallah Ababneh, Kevin Lear | IEEE Journal of Selected Topics in Quantum Electronics | 21 | IEEE | 2015/11 |
In-liquid characterization of in-plane and high order out-of-plane modes of AlN-based square micropl | V Ruiz-Díez, J Hernando-García, A Ababneh, H Seidel, JL Sánchez-Rojas | Microsystem Technologies | 22 | Springer | 2016 |
A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors | Víctor Ruiz-Díez, Javier Toledo, Jorge Hernando-García, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas | Sensors | 19 | MDPI | 2019/1 |
Characteristics of Polyimide-planarized Oxide-confined Vertical-cavity Surface-emitting Laser (VCSEL) Diodes with Passive Heat Sinking | AN Al-Omari, AMK Dagamseh, OM Khreis, A Ababneh, KL Lear | Lasers in Engineering | Vol. 38 | Old City | 2017/12/1 |
Characteristics of Polyimide-planarized Oxide-confined Vertical-cavity Surface-emitting Laser (VCSEL) Diodes with Passive Heat Sinking | AN Al-Omari, AMK Dagamseh, OM Khreis, A Ababneh, KL Lear | Lasers in Engineering | Vol. 38 | Old City | 2017/12/1 |
Improved Small-Signal Characteristics of Infrared 850 nm Top-Emitting Vertical-Cavity Lasers | Ahmad Al-Omari, Osama Khreis, Ahmad MK Dagamseh, Abdullah Ababneh, Kevin Lear | World Academy of Science, Engineering and Technology, International Journal of Electrical, Computer, Energetic, Electronic and Communication Engineering | 11 | ---- | 2017/11/4 |
Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid | Alex Díaz-Molina,Víctor Ruiz-Díez, Jorge Hernand o-García, Abdallah Ababneh, Helmut Seidel, Jose Luiz Sanches-Rojas | Micromachines | 10 | MDPI | 27/4/2019 |
Polyatomic degrees of freedom and their temporal evolution extracted from the damping of micro-oscillators | T Zengerle, J Joppich, P Schwarz, A Ababneh, H Seidel | Sensors and Actuators A: Physical | ---- | ---- | 23/7/2019 |
Optical characterization of sputtered aluminum nitride thin films – correlating refractive index with degree of c-axis orientation | Abdallah ababneh, Zaid Bataineh, Ahmad Dagamseh, Bruno schaefer, Tobias Zengerle, Karin Bauer, Helmut Seidel | Thin Solid Films | 693 | Elsevier | 2020/1/1 |
Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid | ---- | ---- | 10 | Micromachines\MDPI | 2019-04-27 00:00:00 |
A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors | ---- | ---- | 19 | Sensors/MPDI | 2019-02-06 00:00:00 |
Polyatomic degrees of freedom and their temporal evolution extracted from the damping of micro-oscillators | ---- | ---- | 297 | Sensors and Actuators A: Physical/ Elsevier | 2019-07-23 00:00:00 |
Optical characterization of sputtered aluminum nitride thin films – correlating refractive index with degree of c-axis orientation | ---- | ---- | ---- | Thin Solid Films/ Elsevier | 2019-11-15 00:00:00 |
Modeling the damping mechanism of MEMS oscillators in the transitional flow regime with thermal waves | T Zengerle, J Joppich, P Schwarz, A Ababneh, H Seidel | Sensors and Actuators A: Physical | ---- | ---- | 2020/5/23 |
Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates | Víctor Ruiz-Díez, Jorge Hernando-García, Javier Toledo, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas | Micromachines | 11 | MDPI | 2020/5 |
Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films | A. M. Alsaad, Qais M. Al-Bataineh, I. A. Qattan, Ahmad A. Ahmad, A. Ababneh, Zaid Albataineh, Ihsan A. Aljarrah and Ahmad Telfah | Frontiers in Physics | ---- | ---- | 05 May 2020 |
Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates | ---- | ---- | 11 | Micromachines/MDPI | 2020-05-20 00:00:00 |
Modeling the damping mechanism of MEMS oscillators in the transitional flow regime with thermal waves | ---- | ---- | 311 | Sensors and Actuators A: Physical/Elsevier | 2020-05-23 00:00:00 |
Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films | ---- | ---- | 8 | Frontiers in Physics | 2020-05-05 00:00:00 |
Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures | Ababneh, A., Dagamseh, A. M. K., Albataineh, Z., Tantawi,M., Albataineh, Q. M., Telfah, M., Zengerle, T., & Seidel, H | Microsystem Technologies | ---- | ---- | 03.01.2021 |
Optical and structural properties of aluminium nitride thin-films
synthesized by DC-magnetron sputtering technique at different
sputtering pressures | ---- | ---- | ---- | Microsystem Technologies/ Springer | 2021-01-03 00:00:00 |
Piezoelectric MEMS Linear Motor for Nanopositioning Applications | Víctor Ruiz-Díez 1, Jorge Hernando-García, Javier Toledo, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas | actuators | Vol. 10 | MDPI | 18.02.2021 |
Piezoelectric MEMS Linear Motor for
Nanopositioning Applications | ---- | ---- | 10 | actuators/ MDPI | 2021-02-18 00:00:00 |
Using the Nonlinear Duffing Effect of Piezoelectric Micro-Oscillators for Wide-Range Pressure Sensing | Tobias Zengerle, Michael Stopp, Abdallah Ababneh and Helmut Seidell | actuators | 10 | MDPI | 24.07.2021 |
Using the Nonlinear Duffing Effect of Piezoelectric
Micro-Oscillators for Wide-Range Pressure Sensing | ---- | ---- | 10 | actuators/ MDPI | 2021-07-24 00:00:00 |
Equivalent circuit model for the damping of micro-oscillators from molecular to viscous flow regime | T Zengerle, J Joppich, H Lensch, A Ababneh and H Seidell | Journal of Micromechanics and Microengineering | 31 | IOP science | 18.08.2021 |
Equivalent circuit model for the
damping of micro-oscillators from
molecular to viscous flow regime | ---- | ---- | 31 | ---- | 2021-08-18 00:00:00 |
Thermal resonance model for micro-oscillators in the vicinity of a geometric boundary | T. Zengerle, A.Ababneh, H. Seidel | Sensors and Actuators: A. Physical | 113614 | ---- | 11.5.2022 |
Generalized Damping Model for MEMS Oscillators from Molecular to Viscous Flow Regime | T. Zengerle, A. Ababneh, H. Seidel | Eng | 3 | MDPI | 25.2.2022 |
Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators | Víctor Ruiz-Díez, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas | Micromachines | 13 | MDPI | 28-7-2022 |